MEMS-Based Power Gating for Highly Scalable Periodic and Event-Driven Processing

For periodic and event-driven applications with long standby times, controlling leakage is essential. This paper investigates using MEMS switches for power gating processors, which eliminates standby leakage power and allows for highly scalable processing. We show that when power gating with a MEMS switch, low technology nodes and low threshold voltages, which offer low switching energy and high speeds, are optimal. We also compare a MEMS-gated processor to two recent low leakage processors and show that it is ideal for applications with 100+ ms standby times. With CMOS compatibility on the horizon, MEMS switches are an attractive option for low-leakage applications.