Y. Matsumoto, Naoki Nishioka, A. Koizumi, Akito Uemura, Ryosuke Nakamura, M. Yoshimura, H. Horibe, T. Kamimura
{"title":"在不造成激光损伤的情况下,对激光辐照引起的光刻胶剥离现象进行高速成像","authors":"Y. Matsumoto, Naoki Nishioka, A. Koizumi, Akito Uemura, Ryosuke Nakamura, M. Yoshimura, H. Horibe, T. Kamimura","doi":"10.1117/12.2598555","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":297423,"journal":{"name":"Laser-Induced Damage in Optical Materials 2021","volume":"79 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-10-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High-speed imaging of photoresist stripping phenomena induced by laser irradiation without causing the laser damage\",\"authors\":\"Y. Matsumoto, Naoki Nishioka, A. Koizumi, Akito Uemura, Ryosuke Nakamura, M. Yoshimura, H. Horibe, T. Kamimura\",\"doi\":\"10.1117/12.2598555\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":297423,\"journal\":{\"name\":\"Laser-Induced Damage in Optical Materials 2021\",\"volume\":\"79 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-10-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Laser-Induced Damage in Optical Materials 2021\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2598555\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser-Induced Damage in Optical Materials 2021","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2598555","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}