基于氢化碳脉冲直流溅射的耐用红外光学涂层

Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI:10.1364/OIC.2019.MC.10

D. Gibson, L. Fleming, Shigeng Song, H. Chu, Cheng Li, Sam Ahmadzadeh, Ryan Swindell, Xiaoling Zhang, P. Navabpour, C. Clark, M. Bailey

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摘要

介绍了室温脉冲直流溅射沉积氢化碳的光学、力学、应力和环境性能。结果表明，该材料具有良好的光学、环保和耐用性能，适合作为外表面耐用红外光学涂层使用。

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Durable infrared optical coatings based on pulsed DC sputtering of hydrogenated carbon

Optical, mechanical, stress and environmental properties of room temperature pulsed DC sputter deposited hydrogenated carbon are presented. Results show optical, environmental and durability performance suitable for use as an external surface durable infrared optical coating.

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Optical Interference Coatings Conference (OIC) 2019

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