颜色编码光学轮廓术,具有>10/sup / 6/光学分辨深度步长

E. Hasman, V. Kleiner, N. Davidson, A. Friesem
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摘要

只有摘要形式。基于颜色编码排列的光条纹三角测量配置允许平行,快速,实时的3d表面轮廓测量,具有扩展的深度测量范围和高轴向和横向分辨率。该方法利用多色照明和沿轴分散入射光的圆柱形元件,从而增加了深度测量范围,而不会降低轴向或横向分辨率。在我们最近的实验中,圆柱形元件是一个组合的衍射-折射光学元件,其中许多不同波长的光条同时聚焦在不同的焦距上,形成彩虹光片。采用颜色解码技术,在检测过程中光谱滤波器同时匹配光片的整个波长分布,进一步提高了对每个颜色条纹的识别能力。实验得到焦深增加了20倍,而具有极小副瓣的衍射限制光条纹完全保持不变。
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Color-coded optical profilometry with >10/sup 6/ optically resolved depth steps
Summary form only. Light stripe triangulation configuration based on a color-coded arrangement allows parallel, fast, real-time 3-D surface profilometry with an extended depth-measuring range and high axial and lateral resolution. The method exploits polychromatic illumination and a cylindrical element that disperses the incident light along the axis, leading to an increased depth-measuring range without any decrease in the axial or the lateral resolution. In our recent experiments the cylindrical element was a combined diffractive-refractive optical element in which many light stripes, each of a different wavelength, are simultaneously focused at different focal lengths, forming a rainbow light sheet. The discrimination of each color stripe was further improved by a color decoding technique, in which a spectral filter simultaneously matched the entire wavelength distribution of the light sheet during detection. A 20-fold increase in the depth of focus was experimentally obtained, while diffraction-limited light stripes with extremely small sidelobes were completely maintained.
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