pv气动机械系统的一维解析模型

Ronen S. Lautman, Liron Shani, B. Nishri
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摘要

本文提出了PV气动力学系统的一维解析模型,并与三维CFD模型进行了比较。一维模型是基于气流和电流的类比。PV气动机械系统通过在基板和精确的刚性表面之间创建气垫,具有双向气动机械弹簧特性,可以精确定位薄而柔性的基板。喷嘴可以用流量(Q)和压降(∆p)之间的关系来描述:R∝∆p/Qn,其中n取决于特征行为,(在本工作中)介于1和2之间。1D模型在计算上比3D CFD模型便宜得多。虽然1D模型需要一个CFD 3D模型分析来量化气垫中的精确阻力,但当改变气隙、压力/真空供应和流量等其他参数时,它可以非常快速地计算出性能。在气隙刚度方面,一维分析模型与全CFD分析结果的差异约为3%。
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1D ANALYTIC MODEL FOR PV AEROMECHANICAL SYSTEMS
The current work presents a 1D analytic model for a PV aeromechanical system and compares it with a 3D CFD model. The 1D model is based on the analogy between airflow and electric current. A PV aeromechanical system enables accurate positioning of thin, flexible substrates by creating an air cushion between the substrate and an accurate, rigid surface, having bi-directional aeromechanical spring-like behavior. Nozzle can be described as the relation they allow between flow (Q) and pressure drop (∆p): R ∝ ∆p/Qn where n depends on the characteristic behavior and (in this work) is between 1 and 2. The 1D model is computationally much cheaper than the 3D CFD model. Although the 1D model requires one CFD 3D model analysis for quantifying the exact resistance in the air cushion, it allows very fast calculations of performance when varying the other parameters of air gap, pressure/vacuum supply, and flowrate. The difference between 1D analytic model and full CFD analysis, in terms of air gap stiffness results was approximately 3%.
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