A Fabrication Method To Form Glass Capillary

Micromachined glass capillary with a widely application in biological, pharmaceutical and chemical sample treatment and analysis. It also plays an important role in the microfluidic devices. A novel microfabrication method to form a glass capillary is presented here, in which glass channel wafer need to be anodicly bonded with a SiO2 surface of the silicon wafer and the silicon TMAH (Tetra-methyl-ammonium-hydroxide) wet ecthing process is followed. This method requests a lower bonding temperature comparing with conventional glass to glass fusion bonding approach and show an advantage.