两对向表面声波诱导的薄膜半导体声电相互作用

Wen-Chung Wang, H. Schachter, B. Elasir, Z.S. Wu, S. Onishi
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引用次数: 7

摘要

对由半导体薄膜组成的器件几何形状的两个反方向表面声波(SAW)所引起的非线性声电相互作用进行了统一连贯的分析。要处理的非线性相互作用的主要特征是双相特性、信号增强、对称性和表面条件。讨论的几何形状是利用两个反向声表面波通过压电耦合产生的电场的横向、法向和切向分量的几何形状。包括实验结果。各种类型的声电信号处理器已被报道(1)-(21)。然而,到目前为止讨论的大多数结构都是无限厚度的半导体;即,大于几个德拜长度。本文统一连贯地分析了由两个对向表面声波(SAW)引起的非线性声电相互作用,特别是由半导体薄膜组成的器件几何形状。要处理的非线性相互作用的主要特征是双相特性、信号增强、对称性和表面条件。要讨论的几何图形是利用两个反向声表面波通过压电耦合产生的电场的横向、法向和切向分量的几何图形。假设表面声波沿z方向传播,基材表面在xz平面,表面法线在y方向。然后,横线、法线和切线分别对应于x、y和z方向。在横模工作中,由于器件的对称性,在不存在直流偏置的情况下,两个反向声表面波在和频率和差频率处产生的非线性信号为零
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Acoustoelectric Interactions in Thin-Film Semiconductors Induced by Two Contra-Directed Surface Acoustic Waves
The nonlinear acoustoelectric interactions due to two con- tra-directed surface acoustic waves (SAW) for device geometries, consist- ing of semiconductor thin films, are analyzed in a unified and coherent manner. Main features of the nonlinear interactions to be addressed are biphased characteristics, signal enhancement, symmetry, and surface conditions. The geometries discussed are those utilizing the transverse, the normal and the tangential components of electric fields induced by two contra-directed SAW's through piezoelectric coupling. Experimental results are included. ARIOUS TYPES of acoustoelectric signal processors have been reported ( l)-(21). However, most of the structures discussed so far are with semiconductors of infinite thickness; i.e., larger than several Debye lengths. In this paper the nonlinear acoustoelectric interactions due to two contra- directed surface acoustic waves (SAW) for device geometries, particularly consisting of semiconductor thin films, are analyzed in a unified and coherent manner. Main features of the nonlinear interactions to be addressed are biphased characteristics, signal enhancement, symmetry, and surface conditions. Geometries to be discussed are those utilizing the transverse, the normal and the tangential components of electric fields induced by two contra-directed SAW's through piezoelectric coupling. Assuming that the surface acoustic waves are propagating in the z-direction, substrate surface is in the xz plane and the surface normal is in the y direction. Then, the transverse, normal, and tangential correspond to the directions of x, y, and z, respectively. In the transverse-mode operation, the nonlinear signal generation due to two contra-directed SAW's at both the sum and difference frequencies are zero in the absence of dc biasing due to the symmetry of the device
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