空间应用全金属大接触力可靠RF-MEMS继电器的研制

P. Blondy, A. Pothier, R. Stefanini, J. Gauvin, Damien Passerieux, Olivier Vendier, F. Courtade
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引用次数: 1

摘要

本文介绍了用于空间应用的RF-MEMS继电器的发展情况。大力静电致动器的集成极大地提高了开关的制造成品率和可靠性。该器件没有众所周知的RF-MEMS问题,如控制电压漂移,温度灵敏度。该器件可以在70°C下保持关机状态数天,而静态特性没有明显变化,并且有几个器件已成功循环高达5000万次,接触电阻稳定。
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Development of an all-metal large contact force reliable RF-MEMS relay for space applications
This paper presents the development of and RF-MEMS relay for space applications. The integration of a large force electrostatic actuator has permitted dramatic improvement of the switch fabrication yield and reliability. The device does not suffer from well-known RF-MEMS issues such as drift in control voltage, temperature sensitivity. The device could be held in the down state for several days, at 70°C, without significant changes in the static characteristics and several devices have been successfully cycled up to 50 million cycles, with stable contact resistance.
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