Design of Patch Antenna Array with Cavity Structure on Quartz Glass for Radar Applications

This paper presents a 77 GHz patch antenna array with cavity structure based on the process of MEMS techniques for millimeter-wave radar. The designed antenna consists of feed line network and radiating patch, which are the integral parts of the antenna. The bandwidth is effectively improved by loading the cavity structure on the quartz glass substrate through MEMS process. The simulation results confirmed that the proposed antenna array obtains a bandwidth of 4.2% (from 75.25 to 78.47 GHz), with a 10.7 dB max gain within the bandwidth. The proposed antenna array has advantages in gain and bandwidth, indicating a great potential in the field of the millimeter-wave radar antenna. In addition, quartz glass substrate with cavity structures provides a solution for relatively high radiation efficiency and gain due to its lower mass production cost and better electronic compatibility. Thus, the designed quartz glass-based patch antenna array can be batch fabricated at low cost, and is highly suitable for hybrid integration with 77GHz millimeter-wave radar chips, thereby improving the performance of millimeter-wave radar.