{"title":"微悬臂式离子聚合物-金属致动器的研制","authors":"I. Shimizu, K. Kikuchi, S. Tsuchitani","doi":"10.1109/SII.2010.5708338","DOIUrl":null,"url":null,"abstract":"In this study, in order to develop fabrication process of ionic polymer-metal composite (IPMC) actuator of microcantilever type, we evaluated actuation characteristics of a thin film type IPMC. Though its displacement was smaller than that of IPMCs fabricated by using the commercial ionic polymer (Nafion) film, the actuation of the thin film type IPMCs was confirmed. It depended on the thickness of the Nafion layer. We can expect the realization of MEMS devices integrated with the thin film type micro IPMCs fabricated by the propose method.","PeriodicalId":334652,"journal":{"name":"2010 IEEE/SICE International Symposium on System Integration","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Fabrication of ionic polymer-metal actuator of microcantilever type\",\"authors\":\"I. Shimizu, K. Kikuchi, S. Tsuchitani\",\"doi\":\"10.1109/SII.2010.5708338\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study, in order to develop fabrication process of ionic polymer-metal composite (IPMC) actuator of microcantilever type, we evaluated actuation characteristics of a thin film type IPMC. Though its displacement was smaller than that of IPMCs fabricated by using the commercial ionic polymer (Nafion) film, the actuation of the thin film type IPMCs was confirmed. It depended on the thickness of the Nafion layer. We can expect the realization of MEMS devices integrated with the thin film type micro IPMCs fabricated by the propose method.\",\"PeriodicalId\":334652,\"journal\":{\"name\":\"2010 IEEE/SICE International Symposium on System Integration\",\"volume\":\"47 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 IEEE/SICE International Symposium on System Integration\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SII.2010.5708338\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 IEEE/SICE International Symposium on System Integration","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SII.2010.5708338","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication of ionic polymer-metal actuator of microcantilever type
In this study, in order to develop fabrication process of ionic polymer-metal composite (IPMC) actuator of microcantilever type, we evaluated actuation characteristics of a thin film type IPMC. Though its displacement was smaller than that of IPMCs fabricated by using the commercial ionic polymer (Nafion) film, the actuation of the thin film type IPMCs was confirmed. It depended on the thickness of the Nafion layer. We can expect the realization of MEMS devices integrated with the thin film type micro IPMCs fabricated by the propose method.
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