用纳米压印光刻技术制备曲面抗反射蛾眼结构

M. Haslinger, A. Moharana, M. Mühlberger
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引用次数: 5

摘要

在这项工作中,我们描述了一种有效而简单的方法,通过基于UV的纳米压印光刻技术,使用软邮票对具有抗反射蛾眼结构的3D物体进行表面图图化。所谓的抗反射蛾眼结构是亚波长纳米结构,可以减少整个可见光谱表面的反射。这种宽频带抗反射涂层对于像透镜这样的光学元件来说尤其有趣。
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Antireflective moth-eye structures on curved surfaces fabricated by nanoimprint lithography
In this work, we describe an effective and simple method for surface patterning of 3D objects with antireflective moth-eye structures via UV based nanoimprint lithography using soft stamps. So-called anti-reflective moth-eye structures are subwavelength nanostructures that can reduce the reflection of surfaces over the entire visible spectrum of light. Such broadband antireflective coatings are especially interesting for optical elements like lenses.
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