氧化铝在高温下的二次电子发射和表面充电

S. Michizono, Y. Saito, Suharyanto, Y. Yamano, S. Kobayashi
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引用次数: 3

摘要

电击穿是在真空中开发紧凑和/或高压绝缘的最严重问题之一。高二次电子发射(SEE)产率导致多因子效应(介电表面的电子倍增)。多因素不仅引起放电,而且引起表面过热,导致局部表面熔化。因此,高温下的SEE对于理解实际击穿过程非常重要。为了避免蓝宝石表面充电,在高温下用扫描电子显微镜(SEM)用单脉冲光束法测量了蓝宝石的SEE产率。一般情况下,由于表面充电,有效SEE降低了多个因素。由于电导率在高温下变得更高,由于较少的表面充电,有效SEE可以更大。为了估计表面电荷,在室温和高温下向蓝宝石盘注入了多脉冲光束。
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Secondary electron emission and surface charging from alumina at high temperature
Electrical breakdown is one of the most serious problems for developing compact and/or higher-voltage insulation in a vacuum. High secondary electron emission (SEE) yields result in the multipactor effect (electron multiplication on the dielectric surface). Multipactor induces not only discharging, but also excess surface heating, leading to localized surface melting. Thus, SEE at high temperature is important for understanding the actual breakdown process. The SEE yields of sapphire were measured at high temperature by a single-pulsed beam method with a scanning electron microscope (SEM) so as to avoid surface charging. In general, the effective SEE decreases by multipactor due to surface charging. Since the electrical conductivity becomes higher at a high temperature, effective SEE can be larger due to less surface charging. In order to estimate the surface charging, multi-pulse beams were injected to sapphire disks at room and high temperature.
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