Influence of Process Parameters in Deterministic Microgrinding

The expanded capabilities of the Opticam equipment have resulted in the introduction of a new regime of machining of brittle materials, called deterministic microgrinding. Optical components are deterministically microground to a very high level of form accuracy (1/5 wave peak to valley) and surface finish (50 Angstroms rms) using a repeatable and predictable computer controlled process. This is a result of the introduction of precision machine tools to optics manufacturing. The surface finish being achieved on optical glass is unprecedented using a production oriented process (cycle time of 10 min./surface) There remains substantial work to be done in understanding and optimizing process parameters for deterministic microgrinding of a wide range of optical materials. A comprehensive process parameter study is being carried out on all of the Opticam machines, including in depth development studies of feeds and speeds, material, tool, and coolant properties, and machine characteristics. Following is a brief description of some results to date.