{"title":"三轴MEMS霍尔效应传感器","authors":"Wei Cai, Jeremy Chan, D. Garmire","doi":"10.1109/SAS.2011.5739801","DOIUrl":null,"url":null,"abstract":"A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this MEMS device and report its preliminary performance based on comparisons to a laboratory Gauss meter.","PeriodicalId":401849,"journal":{"name":"2011 IEEE Sensors Applications Symposium","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"29","resultStr":"{\"title\":\"3-axes MEMS Hall-effect sensor\",\"authors\":\"Wei Cai, Jeremy Chan, D. Garmire\",\"doi\":\"10.1109/SAS.2011.5739801\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this MEMS device and report its preliminary performance based on comparisons to a laboratory Gauss meter.\",\"PeriodicalId\":401849,\"journal\":{\"name\":\"2011 IEEE Sensors Applications Symposium\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-03-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"29\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 IEEE Sensors Applications Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SAS.2011.5739801\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 IEEE Sensors Applications Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SAS.2011.5739801","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this MEMS device and report its preliminary performance based on comparisons to a laboratory Gauss meter.
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