小型化光谱仪技术

2010 9th Euro-American Workshop on Information Optics Pub Date : 2010-07-12 DOI:10.1109/WIO.2010.5582486

J. Antila

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引用次数: 3

摘要

VTT开发了新的基于MEMS的光谱仪技术，以满足从紫外到热红外的各种光谱传感需求。新发明涵盖了从350 nm到14 μ m的波长范围，并扩大了器件的孔径以提高吞吐量。综述了VTT表面微加工法布里-珀罗干涉仪技术，重点介绍了其关键参数，并对相关仪器进行了介绍。

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Miniaturized spectrometer technologies

VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation.

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2010 9th Euro-American Workshop on Information Optics

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