快速刀具伺服金刚石车削加工自由曲面光学元件的方法

Yansong Guo, Xiao-jing Yang, Tong Yao, G. Du, Xueying Wang
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摘要

与球面和非球面光学元件相比,光学自由曲面在光学设计中具有更高的自由度。自由曲面光学元件在成像光学系统中的应用,有利于简化系统结构,提高成像质量,在照明、成像和非成像等方面有着广泛的应用。本文介绍了快速刀具伺服(FTS)金刚石车削的基本原理、加工过程及其在光学加工领域的应用。利用FTS金刚石车削技术对铝合金材料进行了一系列的加工实验,对XY多项式自由曲面反射镜进行了表面精度和粗糙度测量。研究了进给速度、主轴转速和切削深度对表面粗糙度的影响,并确定了相应的函数关系曲线。结果表明:进给量对铝自由曲面表面粗糙度的影响最大,随着进给量的增大,表面粗糙度逐渐增大;主轴转速和切削深度对表面粗糙度影响较小。曲线拟合程度高,能较准确地预测加工自由曲面的表面粗糙度。最终加工的自由曲面三维表面精度PV为0.22μm,二维表面粗糙度Ra值为3.5nm,加工表面达到镜面光洁度。
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Machining approach of freeform optics via fast tool servo diamond turning
Optical freeform surfaces can provide a higher degree of freedom in optical design, compared with spherical and aspherical optical components. The application of freeform optical components in imaging optical systems is conducive to simplifying the system structure and improving imaging quality, and has wide applications in illumination, imaging and non-imaging, etc. This paper introduces the basic principle and process of fast tool servo (FTS) diamond turning, and its application in the field of optical processing. A series of machining experiment was carried out on aluminum materials by FTS diamond turning for XY polynomial freeform surface mirrors, and the surface accuracy and roughness were measured. The effects of feed rate, spindle speed, and cutting depth on surface roughness were studied and corresponding functional relationship curves were determined. The results show that the feed rate had the greatest influence on surface roughness of aluminum freeform surfaces, as the feed rate increased, the surface roughness increased gradually; the spindle speed and cutting depth have relatively little influence on surface roughness. The fitting degree of curves was very high, which can predict the surface roughness of machined freeform more accurately. The 3-D surface accuracy PV of the final processed freeform surface was 0.22μm, and the 2-D surface roughness Ra value was 3.5nm, the machined surface reached a mirror finish.
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