MEMS陀螺仪正交误差的先进计算方法

2013 IEEE SENSORS Pub Date : 2013-12-19 DOI:10.1109/ICSENS.2013.6688463

S. Kehrberg, Markus Dorwarth, M. Heitz, Carsten Geckeler, J. Mehner

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引用次数: 1

摘要

MEMS振动角速率传感器的工作原理是通过科里奥利力耦合驱动振动模态和正交感知模态。由制造公差引起的两个本征模之间的寄生耦合称为正交。以往的工作仅通过在刚度矩阵中加入耦合项来模拟驱动模式和检测模式之间的正交效应。新方法是在系统质量矩阵中加入一个惯性耦合项。这大大减少了计算时间，同时提高了精度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Advanced methods for calculating quadrature errors of MEMS gyroscopes

MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between drive and detection mode by only adding a coupling term in the stiffness matrix. The new method is adding an inertial coupling term to the system mass matrix. This leads to a large decrease of the calculation time in combination with a higher accuracy.

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2013 IEEE SENSORS

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