含陷波滤波器的原子力显微镜MPC控制器的性能

M. S. Rana, H. Pota, I. Petersen
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引用次数: 1

摘要

原子力显微镜(AFM)扫描单元的非线性特性限制了其在高扫描速度下的成像性能;即压电管扫描仪(PTS)。为了提高AFM的成像速度,在PTS的X轴和Y轴上都采用了模型预测控制(MPC)方案来减小其非线性效应,并采用改进的MPC- notch方案来改善谐振模式的阻尼。为了验证所提方案所取得的性能改进,对所提方案的扫描图像、现有AFM比例积分(PI)控制器和开环AFM系统进行了比较。
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On the performance of an MPC controller including a Notch filter for an AFM
The imaging performance of an atomic force microscope (AFM) at high scanning speeds is limited due to the nonlinear behavior of its scanning unit; i.e., the piezoelectric tube scanner (PTS). In order to increase the imaging speed of the AFM, a model predictive control (MPC) scheme is applied in both the X and Y piezo axes of the PTS to reduce its nonlinearity effects and a modified MPC-Notch scheme is used to improve in damping of the resonant mode. In order to verify the performance improvement achieved by the proposed schemes, scanned images from them, the existing AFM proportional-integral (PI) controller, and an open-loop AFM system are compared.
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