用顺序微铣削和微模塑制造微通道

Amol Jayram Ghude, K. Bhole
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引用次数: 0

摘要

本文讨论了一种利用金属微模具制造微通道的新方法。微通道在生物化学、生物医学、片上实验室和MEMS器件等领域有着广泛的应用。然而,由于其较小的特征尺寸,制造它是一个挑战。由于微通道有着广泛的应用,但不同的应用需要采用不同的特征尺寸、精加工、材料、参数。因此,为应用程序找到合适的制造过程变得非常重要。制造微通道的传统方法是在玻璃和硅中蚀刻或使用光刻。传统的微通道制造方法不仅成本高,而且耗时长。它需要基础设施和监控良好的洁净室环境,这需要大量的初始投资。本文的重点是提供一种简单、经济的制备微通道的方法。在该方法中,采用顺序微铣削方法在黄铜衬底上复制微通道,然后用PDMS作为模塑材料生产微通道。本文详细讨论了成型材料的选择和工艺。
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Fabrication of microchannel using sequential micromilling and micromoulding
A new fabrication method for producing microchannel using metallic micromold is discussed in this paper. Microchannels have attracted different applications such as biochemistry, biomedical, lab-on-a chip and MEMS devices, etc. However, due to its lesser feature size the fabrication of it is a challenge set ahead. As microchannels have vast applications, but different feature size, finishing, materials, parameters are used according to different application. Hence, it becomes important to find out the appropriate manufacturing processes for an application. Conventional methods for fabricating microchannels are centred either etching in glass and silicon or using lithography. The major problem is that the traditional method to fabricate microchannels are not only expensive but also time consuming. It needs infrastructure and well monitored clean room environment which demands large initial investment. This paper focuses on providing a simple and economical method for fabrication of microchannels. In this proposed method, replica of microchannel is made on a brass substrate using sequential micromilling and then microchannel is produced by using PDMS as molding material. The process and selection of molding material is discussed in detail in this paper.
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