一种新型加热器

Int. J. Comput. Eng. Sci. Pub Date : 2003-09-01 DOI:10.1142/S1465876303001915

R. Dhote, S. Chiluveru, S. Chandorkar, P. Apte

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引用次数: 0

摘要

基于MEMS的加热器被广泛用于驱动目的。传统的加热器具有不同的臂宽，本文提出了一种等宽不等阻的变型设计。在相同条件下，新设计具有响应更快、挠度更大的优点。利用有限元分析软件ANSYS中的耦合单元SOLID98对加热器进行了仿真。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Novel Heatuator

MEMS based heatuators are being used extensively for actuation purpose. The conventional heatuators have different arm widths while this paper proposes a variant design that has equal widths but unequal resistances. The new design brings in the advantages of faster response and greater deflections for similar condition. The heatuators have been simulated using the coupled-fied element SOLID98 of the finite element analysis software ANSYS.

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Int. J. Comput. Eng. Sci.

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