采用观测器对直线电机驱动工作台进行振动抑制的控制方法

SICE 2000. Proceedings of the 39th SICE Annual Conference. International Session Papers (IEEE Cat. No.00TH8545) Pub Date : 2000-07-26 DOI:10.1109/SICE.2000.889661

H. Miyagawa, A. Yamamoto, S. Futami, T. Sumimoto, S. Goto, M. Nakamura

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引用次数: 0

摘要

直线电机驱动工作台运动部件的振动影响其控制性能。提出了一种利用振动抑制观测器对直线电机驱动工作台进行控制的方法。通过振动元件的反馈，可以实现对运动部件振动的抑制。通过仿真和实验验证了其效果。

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Control method of linear motor drive table using observer for the vibration repression

The vibration of moving parts deteriorates control performance in linear motor drive tables. The paper proposes a control method for a linear motor drive table using an observer of vibration suppression. The suppression of the vibration of moving parts becomes possible by feedback of the vibration element. The effect was confirmed by simulation and experiment.

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SICE 2000. Proceedings of the 39th SICE Annual Conference. International Session Papers (IEEE Cat. No.00TH8545)

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