利用ii型InAs/(In,Ga)Sb超晶格的nBn基红外探测器

E. Plis, H. Kim, J. B. Rodriguez, G. Bishop, Y. Sharma, A. Khoshakhlagh, L. Dawson, J. Bundas, R. Cook, D. Burrows, R. Dennis, K. Patnaude, A. Reisinger, M. Sundaram, S. Krishna
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引用次数: 6

摘要

讨论了采用nBn设计的ii型InAs/(In,Ga)Sb超晶格(SL)探测器在MWIR和LWIR光谱区单色和双色工作的发展。首先,报道了一种320 × 256焦平面阵列(FPA),在77K时截止波长为4.2 μm,在Vb=0.7V (77 K)时暗电流密度平均值为1 × 10-7 a /cm2。FPA显示,在16.3 ms积分时间和f/4光学条件下,NEDT值为23.8 mK。在77K时,FPA在4 μm处的峰值响应率和探测率分别为1.5 A/W和6.4 x 1011 Jones。其次,介绍了nBn概念在LWIR探测器设计中的实现。报道了在Vb = +0.9 V、T = 100K条件下,λc ~ 8.0 μm单元素nBn基长波红外探测器的制备。利用偏置依赖的极性可以在不同的施加偏置极性下获得两种颜色响应(λc1 ~ 3.5 μm和λc2 ~ 8.0 μm)。介绍了这种双色探测器的设计和制作方法。通过改变外加偏压的极性,实现了λc1 ~ 4.5 μm和λc2 ~ 8 μm的双波段响应。当施加的偏置电压在一个非常小的偏置范围内(~100 mV)变化时,光谱响应截止波长从MWIR变为LWIR。
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nBn based infrared detectors using type-II InAs/(In,Ga)Sb superlattices
The development of type-II InAs/(In,Ga)Sb superlattice (SL) detectors with nBn design for single-color and dual-color operation in MWIR and LWIR spectral regions are discussed. First, a 320 x 256 focal plane array (FPA) with cutoff wavelength of 4.2 μm at 77K with average value of dark current density equal to 1 x 10-7 A/cm2 at Vb=0.7V (77 K) is reported. FPA reveals NEDT values of 23.8 mK for 16.3 ms integration time and f/4 optics. At 77K, the peak responsivity and detectivity of FPA are estimated, respectively, to be 1.5 A/W and 6.4 x 1011 Jones, at 4 μm. Next, implementation of the nBn concept on design of SL LWIR detectors is presented. The fabrication of single element nBn based long wave infrared (LWIR ) with λc ~ 8.0 μm at Vb = +0.9 V and T = 100K detectors are reported. The bias dependent polarity can be exploited to obtain two color response (λc1 ~ 3.5 μm and λc2 ~ 8.0 μm) under different polarity of applied bias. The design and fabrication of this two color detector is presented. The dual band response (λc1 ~ 4.5 μm and λc2 ~ 8 μm) is achieved by changing the polarity of applied bias. The spectral response cutoff wavelength shifts from MWIR to LWIR when the applied bias voltage varies within a very small bias range (~100 mV).
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