片上导联封装可靠性研究

P. Tsao, L. C. Chang, T. C. Chen, C. Haung, C. Z. Chen
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引用次数: 2

摘要

采用由多种测试结构组成的组装测试芯片(ATC),对SOJ片上导联(lead-on-chip, LOC)封装进行各种可靠性测试后的封装完整性监测。选择两种不同类型的环氧成型化合物,即联苯和EOCN环氧树脂,研究它们对封装可靠性的影响。可靠性测试结束后,在3个测试样品中,由于芯片背面存在较大的缺口(- 120 μm),出现了硅片裂纹。通过有限元分析对其失效机理进行了定性研究,发现由于联苯环氧树脂具有较高的弯曲模量和CTE,在可靠性试验中,联苯环氧树脂封装的芯片中产生的热致应力比EOCN型环氧树脂产生的热致应力更容易导致硅片中的裂纹扩展。
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Investigation of the Lead-On-Chip Package’s Reliability
An assembly test chip (ATC), consisting of varieties of test structures, had been utilized to monitor the package integrity of SOJ lead-on-chip (LOC) packages after various reliability tests. Two different types of epoxy molding compounds, namely biphenyl and EOCN epoxies, were chosen to investigate their effects on package’s reliability. After the reliability tests, silicon chip crack was observed in three test samples due to the existence of a large chip backside chipping (−120 μm). Qualitative study about this failure mechanism was carried out by a finite element analysis, and it was found that, due to the higher flexural modulus and CTE of the biphenyl epoxy, the thermally induced stresses developed in the chip encapsulated by this epoxy during reliability tests were more likely to cause the crack propagation in the silicon chip than those induced by using EOCN type epoxy.
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