Priyanka Dwivedi, Anuroop, Samaresh Das, S. Dhanekar
{"title":"基于MEMS集成MoO3纳米结构的丙酮传感器","authors":"Priyanka Dwivedi, Anuroop, Samaresh Das, S. Dhanekar","doi":"10.1109/ICSENST.2018.8603599","DOIUrl":null,"url":null,"abstract":"This paper presents selective acetone detection using MoO3 (molybdenum trioxide) as a sensing layer. The nanostructures were synthesized using seedless and wafer scale synthesis process. The developed synthesis process is scalable and compatible with IC technology. In order to enhance the sensitivity of the sensor, an on chip Ni (nickel) heater configuration was fabricated for heating the sensor platform. In order to reduce the power consumption, a diaphragm was created using standard Reactive Ion Etching (RIE).","PeriodicalId":181015,"journal":{"name":"2018 12th International Conference on Sensing Technology (ICST)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"MEMS Integrated MoO3 Nanostructures based Acetone Sensor\",\"authors\":\"Priyanka Dwivedi, Anuroop, Samaresh Das, S. Dhanekar\",\"doi\":\"10.1109/ICSENST.2018.8603599\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents selective acetone detection using MoO3 (molybdenum trioxide) as a sensing layer. The nanostructures were synthesized using seedless and wafer scale synthesis process. The developed synthesis process is scalable and compatible with IC technology. In order to enhance the sensitivity of the sensor, an on chip Ni (nickel) heater configuration was fabricated for heating the sensor platform. In order to reduce the power consumption, a diaphragm was created using standard Reactive Ion Etching (RIE).\",\"PeriodicalId\":181015,\"journal\":{\"name\":\"2018 12th International Conference on Sensing Technology (ICST)\",\"volume\":\"34 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 12th International Conference on Sensing Technology (ICST)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENST.2018.8603599\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 12th International Conference on Sensing Technology (ICST)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENST.2018.8603599","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
MEMS Integrated MoO3 Nanostructures based Acetone Sensor
This paper presents selective acetone detection using MoO3 (molybdenum trioxide) as a sensing layer. The nanostructures were synthesized using seedless and wafer scale synthesis process. The developed synthesis process is scalable and compatible with IC technology. In order to enhance the sensitivity of the sensor, an on chip Ni (nickel) heater configuration was fabricated for heating the sensor platform. In order to reduce the power consumption, a diaphragm was created using standard Reactive Ion Etching (RIE).