MEMS Integrated MoO3 Nanostructures based Acetone Sensor

This paper presents selective acetone detection using MoO3 (molybdenum trioxide) as a sensing layer. The nanostructures were synthesized using seedless and wafer scale synthesis process. The developed synthesis process is scalable and compatible with IC technology. In order to enhance the sensitivity of the sensor, an on chip Ni (nickel) heater configuration was fabricated for heating the sensor platform. In order to reduce the power consumption, a diaphragm was created using standard Reactive Ion Etching (RIE).