基于MEMS集成MoO3纳米结构的丙酮传感器

Priyanka Dwivedi, Anuroop, Samaresh Das, S. Dhanekar
{"title":"基于MEMS集成MoO3纳米结构的丙酮传感器","authors":"Priyanka Dwivedi, Anuroop, Samaresh Das, S. Dhanekar","doi":"10.1109/ICSENST.2018.8603599","DOIUrl":null,"url":null,"abstract":"This paper presents selective acetone detection using MoO3 (molybdenum trioxide) as a sensing layer. The nanostructures were synthesized using seedless and wafer scale synthesis process. The developed synthesis process is scalable and compatible with IC technology. In order to enhance the sensitivity of the sensor, an on chip Ni (nickel) heater configuration was fabricated for heating the sensor platform. In order to reduce the power consumption, a diaphragm was created using standard Reactive Ion Etching (RIE).","PeriodicalId":181015,"journal":{"name":"2018 12th International Conference on Sensing Technology (ICST)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"MEMS Integrated MoO3 Nanostructures based Acetone Sensor\",\"authors\":\"Priyanka Dwivedi, Anuroop, Samaresh Das, S. Dhanekar\",\"doi\":\"10.1109/ICSENST.2018.8603599\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents selective acetone detection using MoO3 (molybdenum trioxide) as a sensing layer. The nanostructures were synthesized using seedless and wafer scale synthesis process. The developed synthesis process is scalable and compatible with IC technology. In order to enhance the sensitivity of the sensor, an on chip Ni (nickel) heater configuration was fabricated for heating the sensor platform. In order to reduce the power consumption, a diaphragm was created using standard Reactive Ion Etching (RIE).\",\"PeriodicalId\":181015,\"journal\":{\"name\":\"2018 12th International Conference on Sensing Technology (ICST)\",\"volume\":\"34 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 12th International Conference on Sensing Technology (ICST)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENST.2018.8603599\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 12th International Conference on Sensing Technology (ICST)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENST.2018.8603599","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

本文提出了以三氧化钼(MoO3)为传感层的丙酮选择性检测方法。采用无籽法和晶圆尺度法合成了纳米结构。所开发的合成工艺具有可扩展性,并与集成电路技术兼容。为了提高传感器的灵敏度,采用片上Ni(镍)加热器结构对传感器平台进行加热。为了降低功耗,使用标准反应离子蚀刻(RIE)创建了隔膜。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
MEMS Integrated MoO3 Nanostructures based Acetone Sensor
This paper presents selective acetone detection using MoO3 (molybdenum trioxide) as a sensing layer. The nanostructures were synthesized using seedless and wafer scale synthesis process. The developed synthesis process is scalable and compatible with IC technology. In order to enhance the sensitivity of the sensor, an on chip Ni (nickel) heater configuration was fabricated for heating the sensor platform. In order to reduce the power consumption, a diaphragm was created using standard Reactive Ion Etching (RIE).
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Contact Area Design of Ohmic RF MEMS Switch for Enhanced Power Handling Adaptive Energy Optimization Algorithm for Internet of Medical Things Automatic System for Li-Ion Battery Packs Gas Leakage Detection Flexible Al/PZT/Al composite for piezoelectric applications Detection and characterization of surfing events with smartphones’ embedded sensors
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1