{"title":"多级二维MEMS光开关衬底的缩小方法","authors":"Yi-Zhu Gao, Yaojun Qiao, Yuefeng Ji","doi":"10.1109/ICNIDC.2009.5360972","DOIUrl":null,"url":null,"abstract":"We propose a scheme in theory for any architecture of multistage 2-D MEMS to shrink the substrate for high cost performance. We take advantage of Gaussian beam to reduce the substrate size through the mirror radius, and give the theoretical derivation. By adopting the proposed architecture, we compare some multistage 2-D MEMS architecture in terms of the substrate size and the lens radius, and get some improved results.","PeriodicalId":127306,"journal":{"name":"2009 IEEE International Conference on Network Infrastructure and Digital Content","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"An approach of shrinking the substrate of multistage 2-D MEMS optical switch\",\"authors\":\"Yi-Zhu Gao, Yaojun Qiao, Yuefeng Ji\",\"doi\":\"10.1109/ICNIDC.2009.5360972\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We propose a scheme in theory for any architecture of multistage 2-D MEMS to shrink the substrate for high cost performance. We take advantage of Gaussian beam to reduce the substrate size through the mirror radius, and give the theoretical derivation. By adopting the proposed architecture, we compare some multistage 2-D MEMS architecture in terms of the substrate size and the lens radius, and get some improved results.\",\"PeriodicalId\":127306,\"journal\":{\"name\":\"2009 IEEE International Conference on Network Infrastructure and Digital Content\",\"volume\":\"2 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-12-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 IEEE International Conference on Network Infrastructure and Digital Content\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICNIDC.2009.5360972\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE International Conference on Network Infrastructure and Digital Content","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICNIDC.2009.5360972","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
An approach of shrinking the substrate of multistage 2-D MEMS optical switch
We propose a scheme in theory for any architecture of multistage 2-D MEMS to shrink the substrate for high cost performance. We take advantage of Gaussian beam to reduce the substrate size through the mirror radius, and give the theoretical derivation. By adopting the proposed architecture, we compare some multistage 2-D MEMS architecture in terms of the substrate size and the lens radius, and get some improved results.
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