{"title":"用于微光子电路的三维和二维硅光子晶体","authors":"Y. Vlasov","doi":"10.1109/QELS.2003.238448","DOIUrl":null,"url":null,"abstract":"Summary form only given. Photonic crystals might offer a unique solution for building ultradense photonic integrated circuits. Recent achievements in fabrication of silicon photonic crystals compatible with microelectronics processing will be reported.","PeriodicalId":432096,"journal":{"name":"Conference on Lasers and Electro-Optics, 2003. CLEO '03.","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"3D and 2D silicon photonic crystals for microphotonic circuits\",\"authors\":\"Y. Vlasov\",\"doi\":\"10.1109/QELS.2003.238448\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Summary form only given. Photonic crystals might offer a unique solution for building ultradense photonic integrated circuits. Recent achievements in fabrication of silicon photonic crystals compatible with microelectronics processing will be reported.\",\"PeriodicalId\":432096,\"journal\":{\"name\":\"Conference on Lasers and Electro-Optics, 2003. CLEO '03.\",\"volume\":\"27 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-06-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Conference on Lasers and Electro-Optics, 2003. CLEO '03.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/QELS.2003.238448\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference on Lasers and Electro-Optics, 2003. CLEO '03.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/QELS.2003.238448","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
3D and 2D silicon photonic crystals for microphotonic circuits
Summary form only given. Photonic crystals might offer a unique solution for building ultradense photonic integrated circuits. Recent achievements in fabrication of silicon photonic crystals compatible with microelectronics processing will be reported.
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