{"title":"微型有机兰金循环发电机MEMS涡轮旋转实验","authors":"Kobayashi Yuya, Niki Yuya, Takeda Kenji, Aibara Megumi, Kaneko Minami, Uchikoba Fumio","doi":"10.1109/PowerMEMS54003.2021.9658385","DOIUrl":null,"url":null,"abstract":"This research aims to realize a miniature ORC (organic Rankine cycle) generator, and a MEMS process is used to reduce the size of the turbine structure. The developed MEMS turbine had millimeter scale structure, and it demonstrated the rotational motion by a low-boiling-point medium as a working fluid that can be harvested a low temperature waste heat. The rotation speed of the turbine was measured and compared in open and closed measurement systems. As a result, in the closed system, the maximum rotation speed was 113,207 rpm at heating temperature of 80.2 °C and the inlet pressure of 0.26 MPa. The rotation speed of the open system was lower than that of the closed system because the low-boiling-point medium changed to gas-liquid two-phase in the open system. However, the working fluid released from the turbine in the liquid-phase is preferable for downsizing because it eliminates the need for a condenser.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"79 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Rotational Experiment of MEMS Turbine for Miniature Organic Rankin Cycle Generator\",\"authors\":\"Kobayashi Yuya, Niki Yuya, Takeda Kenji, Aibara Megumi, Kaneko Minami, Uchikoba Fumio\",\"doi\":\"10.1109/PowerMEMS54003.2021.9658385\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This research aims to realize a miniature ORC (organic Rankine cycle) generator, and a MEMS process is used to reduce the size of the turbine structure. The developed MEMS turbine had millimeter scale structure, and it demonstrated the rotational motion by a low-boiling-point medium as a working fluid that can be harvested a low temperature waste heat. The rotation speed of the turbine was measured and compared in open and closed measurement systems. As a result, in the closed system, the maximum rotation speed was 113,207 rpm at heating temperature of 80.2 °C and the inlet pressure of 0.26 MPa. The rotation speed of the open system was lower than that of the closed system because the low-boiling-point medium changed to gas-liquid two-phase in the open system. However, the working fluid released from the turbine in the liquid-phase is preferable for downsizing because it eliminates the need for a condenser.\",\"PeriodicalId\":165158,\"journal\":{\"name\":\"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)\",\"volume\":\"79 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-12-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PowerMEMS54003.2021.9658385\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PowerMEMS54003.2021.9658385","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Rotational Experiment of MEMS Turbine for Miniature Organic Rankin Cycle Generator
This research aims to realize a miniature ORC (organic Rankine cycle) generator, and a MEMS process is used to reduce the size of the turbine structure. The developed MEMS turbine had millimeter scale structure, and it demonstrated the rotational motion by a low-boiling-point medium as a working fluid that can be harvested a low temperature waste heat. The rotation speed of the turbine was measured and compared in open and closed measurement systems. As a result, in the closed system, the maximum rotation speed was 113,207 rpm at heating temperature of 80.2 °C and the inlet pressure of 0.26 MPa. The rotation speed of the open system was lower than that of the closed system because the low-boiling-point medium changed to gas-liquid two-phase in the open system. However, the working fluid released from the turbine in the liquid-phase is preferable for downsizing because it eliminates the need for a condenser.
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