极性控制电掺杂GaAs-InAs隧道场效应晶体管生物传感灵敏度分析

Dharmender, Piyush Yadav, Rashi Gupta, Shivangi Singh
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摘要

本文提出了一种新型的III-V材料极性控制掺杂隧道场效应晶体管(PC- ED-GaAs-InAs-TFET)生物传感器。利用极性控制的概念,在本征GaAs和InAs区域中创建了N+漏极和P+源区。此外,在通向隧道结的栅氧化物中蚀刻纳米空腔,通过固定化生物分子来调节隧道机制。利用中性和带电生物分子,即生物素(k = 2.63)、铁细胞色素c (k = 4.7)、角蛋白(k = 8)和明胶(k = 12),对所提出的生物传感器的灵敏度进行了分析。PC-ED-GaAs-InAs- TFET生物传感器在漏极电流、阈值电压、亚阈值摆幅和$\ mathm {I}_{ON}/\ mathm {I}_{OFF}}$比值方面表现出优异的灵敏度。本文还研究了PC-ED-GaAs-InAs-TFET生物传感器在不同腔体尺寸(厚度和高度)、填充因子和温度影响下的灵敏度。
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Sensitivity Analysis of Polarity Control Electrically doped GaAs-InAs Tunnel Field Effect Transistor for Bio-sensing Application
In this paper, a novel III-V material-based polarity-controlled electrical doped Tunnel field effect transistor (PC- ED-GaAs-InAs-TFET) biosensor has been proposed. The N+ drain and P+ source regions are created in the intrinsic GaAs and InAs regions using the polarity-controlled concept. In addition, a nano-cavity is etched in the gate oxide towards the tunneling junction to modulate the tunneling mechanism via the immobilized biomolecules. The sensitivity of the proposed biosensor is analyzed using neutral and charged biomolecules, namely Biotin (k = 2.63), Ferro-cytochrome c (k = 4.7), Keratin (k = 8) and Gelatin (k = 12). The PC-ED-GaAs-InAs- TFET biosensor exhibits superior sensitivity in terms of drain current, threshold voltage, subthreshold swing, and $\mathrm{I}_{ON}/\mathrm{I}_{OFF}$ ratio. The sensitivity of the PC-ED-GaAs-InAs-TFET biosensor, in terms of various cavity dimensions (thickness and height), fill factors and the effect of temperature has also been investigated.
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