基于铁磁薄膜技术的高灵敏度近磁场探头

IEEE 10th Topical Meeting on Electrical Performance of Electronic Packaging (Cat. No. 01TH8565) Pub Date : 2001-10-29 DOI:10.1109/EPEP.2001.967673

M. Yamaguchi, H. Kikuchi, S. Sugimoto, K. Arai, M. Iwanami, A. Nakamura, S. Hoshino

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引用次数: 5

摘要

将高频载流子型薄膜磁场传感器应用于PCB微带线上的磁场检测。长100 /spl μ m、宽5 /spl μ m、厚1 /spl μ m的CoNbZr薄膜探针可以分辨出线距为200 /spl μ m的曲线。最大可能的信号频率范围估计超过1ghz。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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High sensitivity magnetic near field probe based on ferromagnetic thin-film technology

The high frequency carrier type thin-film magnetic field sensor was applied to detect magnetic field over the microstrip line on a PCB. The 100 /spl mu/m long, 5 /spl mu/m wide and 1 /spl mu/m thick CoNbZr thin-film probe could distinguish a meander line with a line pitch of 200 /spl mu/m. Maximum possible signal frequency range was estimated as over 1 GHz.

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IEEE 10th Topical Meeting on Electrical Performance of Electronic Packaging (Cat. No. 01TH8565)

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