基于光栅干涉仪的高灵敏度声学传感器，配有光电读出模块

Optical Sensors and Sensing Congress (ES, FTS, HISE, Sensors) Pub Date : 2019-06-25 DOI:10.1364/SENSORS.2019.STU4A.3

Zhang Mengying, Ma Zhenjun, R. Gao, Z. Qi, Xing-dong Liang

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引用次数: 0

摘要

我们开发了一种基于光栅干涉仪的声学传感器。干涉结构由玻璃制成，并与光电读出模块封装在一起。该声学传感器实现了高灵敏度和高质量响应。

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A Grating Interferometer based High-Sensitivity Acoustic Sensor Packaged with Optoelectronic Readout Module

An acoustic sensor based on grating interferometer has been developed. The interference structure was made of glass and packaged with the optoelectronic readout module. The acoustic sensor achieved high-sensitivity and high-quality response.

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Optical Sensors and Sensing Congress (ES, FTS, HISE, Sensors)

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