基于等离子体透镜的新型等离子体产生装置

XXIst International Symposium on Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. Pub Date : 1900-01-01 DOI:10.1109/DEIV.2004.1422674

A. Goncharov, I. Brown

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引用次数: 1

摘要

介绍了几种基于静电等离子体透镜结构和等离子体光学原理的新型等离子体器件。这些低成本、高可靠性、低维护的设备可用于在离子处理和材料表面改性的许多不同应用中操纵重离子束。

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Novel plasma generation devices based on the plasma lens

We describe some novel plasma devices based on the electrostatic plasma lens configuration and plasma optics principles. These low cost, high reliability, low maintenance devices can be used for manipulating heavy ion beams in a number of different applications for ion treatment and material surface modification.

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来源期刊

XXIst International Symposium on Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV.

CiteScore

0.40

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0.00%

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