{"title":"气体传感用微氦放电光离探测器","authors":"S. Narayanan, M. Agah, G. Rice","doi":"10.1109/ICSENS.2013.6688154","DOIUrl":null,"url":null,"abstract":"This paper reports a 2cm × 1cm easy-to-micromachine helium discharge photoionization detector (μHeDPID) for use in micro gas chromatography by utilizing a lift-off process. This universal detector consumes a miserly 2.5mW for plasma generation and non-destructively photoionizes analyte compounds, thus avoiding fouling of electrodes. The ionized species is detected by a remote electrode connected to a picoammeter. The detector exhibits at least 350pg and 50ppm detection limit for n-octane in air. Despite the detector simplicity, its efficiency is in par with previously reported destructive plasma detectors which are based on more sophisticated spectrometric analysis.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"56 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"A micro helium-discharge photoionization detector for gas sensing\",\"authors\":\"S. Narayanan, M. Agah, G. Rice\",\"doi\":\"10.1109/ICSENS.2013.6688154\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports a 2cm × 1cm easy-to-micromachine helium discharge photoionization detector (μHeDPID) for use in micro gas chromatography by utilizing a lift-off process. This universal detector consumes a miserly 2.5mW for plasma generation and non-destructively photoionizes analyte compounds, thus avoiding fouling of electrodes. The ionized species is detected by a remote electrode connected to a picoammeter. The detector exhibits at least 350pg and 50ppm detection limit for n-octane in air. Despite the detector simplicity, its efficiency is in par with previously reported destructive plasma detectors which are based on more sophisticated spectrometric analysis.\",\"PeriodicalId\":258260,\"journal\":{\"name\":\"2013 IEEE SENSORS\",\"volume\":\"56 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-12-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 IEEE SENSORS\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2013.6688154\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE SENSORS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2013.6688154","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A micro helium-discharge photoionization detector for gas sensing
This paper reports a 2cm × 1cm easy-to-micromachine helium discharge photoionization detector (μHeDPID) for use in micro gas chromatography by utilizing a lift-off process. This universal detector consumes a miserly 2.5mW for plasma generation and non-destructively photoionizes analyte compounds, thus avoiding fouling of electrodes. The ionized species is detected by a remote electrode connected to a picoammeter. The detector exhibits at least 350pg and 50ppm detection limit for n-octane in air. Despite the detector simplicity, its efficiency is in par with previously reported destructive plasma detectors which are based on more sophisticated spectrometric analysis.
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