基于柔性纳米机械臂的紧凑、低成本MSL系统的研制

Volume 9: 15th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications Pub Date : 2019-11-25 DOI:10.1115/detc2019-97522

Zheng Liu, Zhen Zhang, Y. Guan

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引用次数: 1

摘要

提出了一种结构紧凑、性价比高的微型立体光刻样机系统。自行研制的柔性XY纳米操纵工作台负责一层的制造质量。蓝光LED激光模组是一种经济高效的光源。实验结果表明，MSL原型系统能够实现~ 2 μm的圆形图案固化宽度。

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Development of a Compact and Cost Effective MSL System Based on a Compliant Nanomanipulator

This paper proposes a compact and cost-effective MSL (Micro Stereo Lithography) prototyping system. A self-developed compliant XY nanomanipulating stage is responsible for the fabrication quality in one layer. And a blu-ray LED laser module is utilized as a cost-effective light source. The experimental results show that the MSL prototyping system is capable of achieving ∼ 2 μm cured width for circular patterns.

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Volume 9: 15th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications

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