{"title":"Wollaston棱镜干涉仪平面内二自由度位移测量","authors":"H. Hsieh, Ju-Yi Lee, B. Sun, Gang-Yu Fan","doi":"10.1109/MESA.2018.8449196","DOIUrl":null,"url":null,"abstract":"A Wollaston prism (WP)-based interferometer for two-degree-of-freedom (2-DOF) in-plane displacement measurement is developed in this study. The measurement system consists of a heterodyne light source and a high quality WP, and can provide 2-DOF in-plane displacement measurement with high accuracy and stability. Experiments demonstrate that the system has a resolution of 5 nm, and is resistant to outside disturbances as well as internal errors.","PeriodicalId":138936,"journal":{"name":"2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer\",\"authors\":\"H. Hsieh, Ju-Yi Lee, B. Sun, Gang-Yu Fan\",\"doi\":\"10.1109/MESA.2018.8449196\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A Wollaston prism (WP)-based interferometer for two-degree-of-freedom (2-DOF) in-plane displacement measurement is developed in this study. The measurement system consists of a heterodyne light source and a high quality WP, and can provide 2-DOF in-plane displacement measurement with high accuracy and stability. Experiments demonstrate that the system has a resolution of 5 nm, and is resistant to outside disturbances as well as internal errors.\",\"PeriodicalId\":138936,\"journal\":{\"name\":\"2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MESA.2018.8449196\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MESA.2018.8449196","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer
A Wollaston prism (WP)-based interferometer for two-degree-of-freedom (2-DOF) in-plane displacement measurement is developed in this study. The measurement system consists of a heterodyne light source and a high quality WP, and can provide 2-DOF in-plane displacement measurement with high accuracy and stability. Experiments demonstrate that the system has a resolution of 5 nm, and is resistant to outside disturbances as well as internal errors.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
