一种基于SOI的高效横向发光装置

T. Hoang, P. LeMinh, J. Holleman, V. Zieren, M. Goossens, J. Schmitz
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引用次数: 2

摘要

研究了在SIMOX-SOI衬底上实现的p/sup +/-p-n/sup +/侧向二极管的红外光发射。在硅光发射体中,被埋入氧化物的自由载流子被限制在一维空间是提高带间复合概率的关键。我们在我们的设备中发现了与先前文献中提出的结果相当的外部量子效率。发现发射的波长范围为900-1300 nm,这是Si中间接带对带复合的常见波长。该SOI技术在薄单晶硅层和更厚的衬底之间包含绝缘层。这种电绝缘层也是一种热隔离器,因此自热效应在SOI晶圆上制造的器件中很常见。研究了其对器件内光发射和光分布的影响。本文利用Silvaco仿真模型,基于有源区域内载流子的复合率,研究并定量解释了不同有源区域长度器件的特性。
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A high efficiency lateral light emitting device on SOI
The infrared light emission of lateral p/sup +/-p-n/sup +/ diodes realized on SIMOX-SOI (separation by implantation of oxygen - silicon on insulator) substrates has been studied. The confinement of the free carriers in one dimension due to the buried oxide was suggested to be a key point to increase the band-to-band recombination probability in silicon light emitters. We found in our devices an external quantum efficiency comparable to previous results presented in the literature. The wavelength range of the emission was found to be 900-1300 nm which is common for indirect band to band recombination in Si. The SOI technology incorporates an insulating layer between the thin single crystal silicon layer and the much thicker substrate. This electrically insulating layer is also a thermal isolator and so self-heating effects are common in devices fabricated on SOI wafers. Investigation of its influence on the light emission and the light distribution in the device has been carried out in our research. In this paper, the characteristics of the device with different active region lengths were investigated and explained quantitatively based on the recombination rate of carriers inside the active area by using the simulation model in Silvaco.
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