基于拓扑优化的超相干基模机械谐振器设计

2021 Conference on Lasers and Electro-Optics (CLEO) Pub Date : 2021-05-01 DOI:10.1364/cleo_qels.2021.fth2p.8

Dennis Høj, Wenjun Gao, Fengwen Wang, U. Hoff, O. Sigmund, U. Andersen

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摘要

采用拓扑优化方法对氮化硅基膜基模的质量因子×频率积进行了优化。实验证明了2.5倍的增强因子，表明拓扑优化有可能彻底改变膜的设计。

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Ultra-coherent fundamental mode mechanical resonators designed using topology optimization

Topology optimization has been used to optimize the quality factor × frequency product of the fundamental mode of silicon nitride based membranes. A factor of 2.5 enhancement was experimentally demonstrated, showing the potential for topology optimization to revolutionize designs of membranes.

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2021 Conference on Lasers and Electro-Optics (CLEO)

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