红外响应性增强的锗微晶体光电探测器

V. Falcone, A. Ballabio, A. Barzaghi, C. Zucchetti, L. Anzi, J. Frigerio, F. Bottegoni, P. Biagioni, G. Isella
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引用次数: 0

摘要

在Si图案衬底上生长的锗硅微晶体可以作为近红外光探测的吸收元件。在这种微结构中,由于晶体的饰面和图案的周期性,与传统的外延层相比,光约束效应增强了光吸收。实现这类器件的挑战是在微晶阵列上形成一个顶部透明触点。石墨烯可以用作悬浮触点,可以适应微晶体的3d形态,确保形成电连续层。所制备的器件具有比具有相当厚度的平面器件更高的响应率。
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Ge micro-crystals photedetectors with enhanced infrared responsivity
Ge-on-Si micro-crystals grown on Si patterned substrates can be used as absorbing elements for photodetection in the near-infrared. In such microstructures light confinement effects, due to crystal faceting and pattern periodicity, enhance light absorption as compared to conventional epitaxial layers. The challenge in realizing this type of devices is the formation of a top transparent contact suspended on the microcrystal array. Graphene can be used as a suspended contact that can adapt to the 3D-morphology of the microcrystals, ensuring the formation of an electrically continuous layer. The fabricated devices feature a responsivity exceeding that of planar devices with comparable thickness.
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