通过每引脚ESD和泄漏DFT增强ESD和EOS物理分析

Horaira Abu, S. Abdennadher, B. Provost, H. Muljono
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引用次数: 2

摘要

通过对客户大批量退货产品的技术和功能评估,发现静电放电(ESD)和电气超应力(EOS)诱发的损坏是近年来客户退货的两个重要原因。随着硅尺寸的缩小,这些客户的回报预计会上升,因为设备越来越容易受到EOS的影响。随着ESD二极管被普遍用作IC输入/输出(I/O)引脚的保护器件,缺乏片上测试结构来自动验证这些电路。由于客户对零缺陷目标和高EOS故障率的关注,越来越需要定义新的测试方法和技术,能够重现EOS故障,提高IC对EOS事件的鲁棒性,并隔离EOS和ESD故障。本文提出了测试设计(DFT)技术,可用于增强用于筛选EOS和ESD故障的物理分析。
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Augmenting ESD and EOS physical analysis with per pin ESD and leakage DFT
Based on technical and functional evaluation of high volume products returned from customers, Electrostatic Discharge (ESD) and Electrical Overstress (EOS) induced damages are the two significant causes of customer return in recent times. These customer returns are expected to rise as silicon scales down, as devices are becoming more susceptible to EOS. With ESD diodes ubiquitously being used as the protection device for IC Input/Output (I/O) pin, there is a lack of on-die test structures to validate these circuits automatically. Concerned by zero defect targets and high EOS failure rate from customers, there is an increasing need to define new test methods and techniques that are able to reproduce EOS failure, improve IC robustness against EOS events and isolate EOS and ESD failures. This paper proposes Design for Test (DFT) techniques that can be used to augment physical analysis used to screen EOS and ESD failures.
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