用于光学传感的新型悬浮小SiO2脊状光波导

2012 Asia Communications and Photonics Conference (ACP) Pub Date : 2012-11-07 DOI:10.1364/ACPC.2012.ATH1B.4

Pengxin Chen, Yunpeng Zhu, Sailing He, D. Dai

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摘要

制备了新型悬浮SiO2脊状光波导，并对其进行了表征。当工作波长为1550 nm时，弯曲半径为100μm的1μm宽波导的传输损耗约为0.385dB/cm，弯曲损耗约为0.037dB/90°。

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Novel suspended small SiO2 ridge optical waveguides for optical sensing

Novel suspended SiO₂ ridge optical waveguides on silicon are fabricated and characterized. The propagation loss and the bend loss measured are about 0.385dB/cm and 0.037dB/90° respectively for the fabricated 1μm-wide waveguides with a bending radius of 100μm when operating at 1550 nm.

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2012 Asia Communications and Photonics Conference (ACP)

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