M. Knapp, P. Jager, Markus Hauser, U. Rosler, W. Ruile, G. Scheinbacher, M. Honal, I. Bleyl, L. Reindl
{"title":"提高SAW器件频率温度系数的GeO2薄膜性能研究","authors":"M. Knapp, P. Jager, Markus Hauser, U. Rosler, W. Ruile, G. Scheinbacher, M. Honal, I. Bleyl, L. Reindl","doi":"10.1109/EFTF.2014.7331484","DOIUrl":null,"url":null,"abstract":"We have investigated the temperature dependent elastic constants of SiO<sub>2</sub> and GeO<sub>2</sub>. For this purpose, the phase velocity of the layered system has to be calculated using surface acoustic wave (SAW) differential delay lines on LiNbO<sub>3</sub> substrates. Both SiO<sub>2</sub> and GeO<sub>2</sub> have a positive temperature coefficient of velocity. The GeO<sub>2</sub> layer shows a significant reduction of the phase velocity compared to SiO<sub>2</sub> which yields to an improved energy trapping of the surface acoustic wave in the overlay. However, severe stability issues arise using the GeO<sub>2</sub> layer.","PeriodicalId":129873,"journal":{"name":"2014 European Frequency and Time Forum (EFTF)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Investigation of GeO2 thin film properties for improvement of temperature coefficient of frequency of SAW devices\",\"authors\":\"M. Knapp, P. Jager, Markus Hauser, U. Rosler, W. Ruile, G. Scheinbacher, M. Honal, I. Bleyl, L. Reindl\",\"doi\":\"10.1109/EFTF.2014.7331484\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have investigated the temperature dependent elastic constants of SiO<sub>2</sub> and GeO<sub>2</sub>. For this purpose, the phase velocity of the layered system has to be calculated using surface acoustic wave (SAW) differential delay lines on LiNbO<sub>3</sub> substrates. Both SiO<sub>2</sub> and GeO<sub>2</sub> have a positive temperature coefficient of velocity. The GeO<sub>2</sub> layer shows a significant reduction of the phase velocity compared to SiO<sub>2</sub> which yields to an improved energy trapping of the surface acoustic wave in the overlay. However, severe stability issues arise using the GeO<sub>2</sub> layer.\",\"PeriodicalId\":129873,\"journal\":{\"name\":\"2014 European Frequency and Time Forum (EFTF)\",\"volume\":\"10 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-06-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 European Frequency and Time Forum (EFTF)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EFTF.2014.7331484\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 European Frequency and Time Forum (EFTF)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EFTF.2014.7331484","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Investigation of GeO2 thin film properties for improvement of temperature coefficient of frequency of SAW devices
We have investigated the temperature dependent elastic constants of SiO2 and GeO2. For this purpose, the phase velocity of the layered system has to be calculated using surface acoustic wave (SAW) differential delay lines on LiNbO3 substrates. Both SiO2 and GeO2 have a positive temperature coefficient of velocity. The GeO2 layer shows a significant reduction of the phase velocity compared to SiO2 which yields to an improved energy trapping of the surface acoustic wave in the overlay. However, severe stability issues arise using the GeO2 layer.
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