集成杜瓦-冷却器的高灵敏度MWIR波前传感器

S. Velghe, S. Magli, G. Aubry, N. Guerineau, S. Rommeluère, J. Jaeck, B. Wattellier
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摘要

介绍了中波红外(MWIR)光学领域在材料、光学设计和制造等方面的最新进展。他们满足日益增长的需求,更紧凑,更少的温度依赖光学系统,提高光学性能和复杂性(多光谱或高光谱图像)。同时,这些组件的特性已成为战略性的,需要具有更高性能的解决方案。这种器件的光学质量是通过波前传感技术来测量的。PHASICS先前开发了基于四次波横向剪切干涉(QWLSI)的波前传感器,使用宽带微辐射热计相机进行红外测量。然而,它们在MWIR域中的光灵敏度降低,这限制了它们与黑体等宽带光源的使用。为了满足计量需求,我们开发了一种创新的波前传感器。该仪器将QWLSI的计量特性与上一代检测块(红外探测器杜瓦冷却器组件,IDDCA)的辐射性能与HgCdTe技术的量子红外焦平面阵列(IRFPA)相结合。QWLSI的关键部件是放置在距焦平面阵列几毫米处的特定衍射光栅。这一要求意味着该光学器件应集成在IDDCA内部。为了实现这一目标,我们充分利用了IDDCA集成光学器件的最新开发经验。由于这种方法,我们开发了高空间分辨率的MWIR波前传感器(160 × 128点),具有高灵敏度,可以在低通量条件下进行精确测量。本文将介绍该仪器的技术方案、开发关键步骤和在各种计量应用中的实验结果。
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Dewar-cooler-integrated high sensitivity MWIR wave front sensor
Recent developments in the Mid Wave InfraRed (MWIR) optical domain were made on materials, optical design and manufacturing. They answer increasing demands for more compact, less temperature dependent optical systems with increased optical performances and complexity (multi- or hyper- spectral imagery). At the same time, the characterization of these components has become strategic and requires solutions with higher performance. The optical quality of such devices is measured by wave front sensing techniques. PHASICS previously developed wave front sensors based on Quadri-Wave Lateral Shearing Interferometry (QWLSI) using broadband microbolometers cameras for infrared measurements. However they suffer from reduced light sensitivity in the MWIR domain, which limits their use with broadband sources such as black bodies. To meet metrology demands, we developed an innovative wave front sensor. This instrument combines the metrological qualities of QWLSI with the radiometric performances of a last generation detection block (Infrared Detector Dewar Cooler Assembly, IDDCA) with a quantum infrared focal plane array (IRFPA) of HgCdTe technology. The key component of QWLSI is a specific diffractive grating placed a few millimeters from the focal plane array. This requirement implies that this optics should be integrated inside the IDDCA. To achieve this, we take advantage of the experience acquired from recent developments with optics integrated in IDDCA. Thanks to this approach, we developed a high spatial resolution MWIR wave front sensor (160x128 points) with a high sensitivity for accurate measurements under low-flux conditions. This paper will present the instrument technological solutions, the development key steps and experimental results on various metrology applications.
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