放电间隙对微波放电的影响

Zhongli Wang, Yaoyao Wang, J. Shan, Liang Zhu, Wendong Ma
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摘要

为了研究放电间隙对微波放电的影响,本文对不同尺寸的放电间隙中粒子的密度分布、电导率分布以及由此产生的频率漂移进行了模拟。结果表明:间隙半径越小,间隙深度越大,谐振频率越高;间隙大小影响共振过程中粒子浓度的变化;平衡时的共振特性参数不同。
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The Effect of Discharge Gap on Microwave Discharge
In order to study the effect of discharge gap on microwave discharge, the paper has carried out a simulation for the particles' density distribution, conductivity distribution and the resulting frequency drift in discharge gaps of different sizes. The results show that, the smaller the gap radius and the greater the gap depth, the higher the resonance frequency; the gap size affected the change of particle concentration during the resonance process; and the parameters of resonance characteristics were different at the equilibrium time.
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