{"title":"低光和亚毫米分辨率三维成像应用的非晶硅光电探测器的聚焦诱导光响应","authors":"M. Müller, A. Bablich, R. Bornemann, P. Bolívar","doi":"10.1109/IPC53466.2022.9975479","DOIUrl":null,"url":null,"abstract":"We report the Focus-Induced Photoresponse (FIP) in amorphous silicon photodiodes as a key enabler for future high performance 3D imaging systems. The sensors achieve $\\sim 540 \\mu \\mathrm{m}$ depth resolution at ~55 cm, 60 dB signal-to-noise ratio at 1.4 MHz modulation frequency and sensitivities below $0.036 \\mu \\mathrm{W}$/mm2.","PeriodicalId":202839,"journal":{"name":"2022 IEEE Photonics Conference (IPC)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Focus-Induced Photoresponse in Amorphous Silicon Photodetectors for low-light and sub-mm resolution 3D Imaging Applications\",\"authors\":\"M. Müller, A. Bablich, R. Bornemann, P. Bolívar\",\"doi\":\"10.1109/IPC53466.2022.9975479\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report the Focus-Induced Photoresponse (FIP) in amorphous silicon photodiodes as a key enabler for future high performance 3D imaging systems. The sensors achieve $\\\\sim 540 \\\\mu \\\\mathrm{m}$ depth resolution at ~55 cm, 60 dB signal-to-noise ratio at 1.4 MHz modulation frequency and sensitivities below $0.036 \\\\mu \\\\mathrm{W}$/mm2.\",\"PeriodicalId\":202839,\"journal\":{\"name\":\"2022 IEEE Photonics Conference (IPC)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE Photonics Conference (IPC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IPC53466.2022.9975479\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE Photonics Conference (IPC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPC53466.2022.9975479","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Focus-Induced Photoresponse in Amorphous Silicon Photodetectors for low-light and sub-mm resolution 3D Imaging Applications
We report the Focus-Induced Photoresponse (FIP) in amorphous silicon photodiodes as a key enabler for future high performance 3D imaging systems. The sensors achieve $\sim 540 \mu \mathrm{m}$ depth resolution at ~55 cm, 60 dB signal-to-noise ratio at 1.4 MHz modulation frequency and sensitivities below $0.036 \mu \mathrm{W}$/mm2.
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