Determination of lattice parameters of SCS nanobeam in process of tensile test using MEMS actuator

We present a novel experimental method for observing the lattice behavior of single crystal silicon (SCS) nanobeam in process of tensile testing. A TEM in-situ nanobeam tensile testing device has been fabricated and the lattice parameters of SCS nanobeam of different tensile stress have been measured using selected-area electron diffraction (SAED). The results suggest that the trends of the lattice parameters consists with the increasing tensile stress in the SCS nanobeam, and a certain degree of distortion of lattice and movements of crystal dislocations could happen during SCS nanobeam tensile testing.