具有静电可调结构的MEMS陀螺仪的驱动模式控制

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI:10.1109/3M-NANO.2013.6737430

Hui-Jie Zhu, Zhong-he Jin, Shi-chang Hu, Wei Ma, Yidong Liu

{"title":"具有静电可调结构的MEMS陀螺仪的驱动模式控制","authors":"Hui-Jie Zhu, Zhong-he Jin, Shi-chang Hu, Wei Ma, Yidong Liu","doi":"10.1109/3M-NANO.2013.6737430","DOIUrl":null,"url":null,"abstract":"Variable-area capacitor with tuning capability is used to control the drive mode of MEMS gyroscopes for constant-frequency oscillation. The proposed control approach tunes the drive axis natural frequency to a preselected frequency and regulates the amplitude of the drive axis vibration. The algorithm mainly implemented using a field-programmable-gate-array (FPGA) is tested on a MEMS gyroscope operating at atmospheric pressure which is of our own manufacture. First measurement results of the novel digital prototype show the amplitude variance of the detected signal of drive axis is 26ppm in an hour while the phase variance is 45ppm.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Drive mode control for MEMS gyroscopes with electrostatically tunable structure\",\"authors\":\"Hui-Jie Zhu, Zhong-he Jin, Shi-chang Hu, Wei Ma, Yidong Liu\",\"doi\":\"10.1109/3M-NANO.2013.6737430\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Variable-area capacitor with tuning capability is used to control the drive mode of MEMS gyroscopes for constant-frequency oscillation. The proposed control approach tunes the drive axis natural frequency to a preselected frequency and regulates the amplitude of the drive axis vibration. The algorithm mainly implemented using a field-programmable-gate-array (FPGA) is tested on a MEMS gyroscope operating at atmospheric pressure which is of our own manufacture. First measurement results of the novel digital prototype show the amplitude variance of the detected signal of drive axis is 26ppm in an hour while the phase variance is 45ppm.\",\"PeriodicalId\":120368,\"journal\":{\"name\":\"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO.2013.6737430\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2013.6737430","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 6

摘要

采用具有调谐能力的变面积电容控制MEMS陀螺仪的驱动方式，实现恒频振荡。该控制方法将驱动轴固有频率调谐到预定频率，并调节驱动轴的振动幅值。该算法主要采用现场可编程门阵列(FPGA)实现，并在自制的常压MEMS陀螺仪上进行了测试。首先，新型数字样机的测量结果表明，驱动轴的检测信号在1小时内的幅值变化为26ppm，相位变化为45ppm。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Drive mode control for MEMS gyroscopes with electrostatically tunable structure

Variable-area capacitor with tuning capability is used to control the drive mode of MEMS gyroscopes for constant-frequency oscillation. The proposed control approach tunes the drive axis natural frequency to a preselected frequency and regulates the amplitude of the drive axis vibration. The algorithm mainly implemented using a field-programmable-gate-array (FPGA) is tested on a MEMS gyroscope operating at atmospheric pressure which is of our own manufacture. First measurement results of the novel digital prototype show the amplitude variance of the detected signal of drive axis is 26ppm in an hour while the phase variance is 45ppm.

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2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale

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