光栅跟踪的双自适应前馈控制与afm的应用

J. Butterworth, L. Pao, D. Abramovitch
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引用次数: 16

摘要

我们评估了应用于基于压电定位系统的光栅扫描的双自适应前馈控制体系结构的性能。在之前的工作[1]中,我们引入了自适应延迟算法,该算法提高了前馈植物注入架构的跟踪性能。自适应延迟算法的主要优点是不需要了解对象参数的自适应计算。在[1]中,该算法使用基于模型逆的前馈控制来增加光栅跟踪带宽。众所周知,基于模型逆的前馈控制设计在存在大模型变化或不确定性时表现不佳。系统识别方法表明,我们的压电扫描仪的频率响应包含大量的变化,因为用户要求在阶段范围内的不同工作点。因此,跟踪性能会随着模型被识别的条件的变化而下降。为了纠正这一点,我们将自适应延迟算法与更新关键变量参数的部分参数自适应相结合。这种自适应前馈控制器的伙伴关系改善了实验跟踪结果和对模型不确定性的鲁棒性。
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Dual-adaptive feedforward control for raster tracking with applications to AFMs
We evaluate the performance of a dual-adaptive feedforward control architecture applied to the raster scan of a piezo-based positioning system. In previous work [1], we introduced the adaptive-delay algorithm that improved the tracking performance of the feedforward plant-injection architecture. The key benefit of the adaptive-delay algorithm is the adaptation calculation that does not require knowledge of plant parameters. In [1], the algorithm uses model-inverse-based feedforward control to increase raster-tracking bandwidth. It is well known that model-inverse-based feedforward control designs can perform poorly in the presence of large model variation or uncertainty. System identification methods reveal that the frequency response of our piezoscanner includes a large amount of variation as the user requests various operating points within the stage's range. As a result, tracking performance degrades as we vary from the conditions with which the model was identified. To correct for this, we combined the adaptive-delay algorithm with partial-parameter adaptation that updates critically variant parameters. This partnership of adaptive feedforward controllers improved experimental tracking results and robustness to model uncertainties.
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