用扫描菲索干涉仪对8英寸平板进行埃级校准

A. Anderson, L. D. La Fleur, M. Kasserls, D. Zweig
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引用次数: 0

摘要

扫描菲索干涉仪用于测量一组8英寸参考平面。测量图的不确定度小于2 Årms。
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Angstrom-level Calibration of Eight Inch Flats using a Scanning Fizeau Interferometer
A scanning Fizeau interferometer is used to measure a set of eight inch reference flats. The uncertainty in the measured figure is less that 2 Årms.
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