砷化镓(GaAs)内部纳米结构的激光书写

O. Tokel, A. Turnali, P. Deminskyi, S. Ilday, F. Ilday
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引用次数: 1

摘要

最近,我们展示了一种直接激光写入方法,该方法首次实现了硅内部深层的地下修改和功能器件。在这里,我们扩展了该技术,展示了GaAs中第一个受控的亚表面纳米结构。
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Laser Writing of Nanostructures Deep Inside Gallium Arsenide (GaAs)
Recently, we have showed a direct laser writing method that enables the first subsurface modifications and functional devices created deep inside silicon. Here, we extend the technique demonstrating the first controlled subsurface nanostructures in GaAs.
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