人工智能在脉冲激光沉积过程控制中的应用

S.J.P Laube , E.F Stark
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引用次数: 5

摘要

实现脉冲激光沉积(PLD)的过程控制需要执行器、传感器和“材料与加工”知识库。通过使用该知识库,将工艺推向所需的操作区域,可以提高材料沉积的质量和可重复性。知识库包括实验确定的经验关系,描述激光参数的复杂动态相互作用。基于此描述的智能控制可以实现,以减少工艺混乱,并有效地生产具有所需性能的一致涂层。
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Artificial intelligence in process control of pulsed laser deposition

Implementation of process control of pulsed laser deposition (PLD) requires actuators, sensors and a “materials and processing” knowledge base. Improvements in quality and reproducibility of material deposits are achieved by using this knowledge base to drive the process toward desired operating regions. The knowledge base includes experimentally determined, empirical relationships describing the complex dynamical interactions of laser parameters. Intelligent control based on this description can be implemented to reduce process disorder and efficiently produce consistent coatings with desired properties.

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