{"title":"利用时间导数表面反射率优化溅射金岛膜的沉积","authors":"A. Riera, B. Baloukas, O. Zabeida, L. Martinu","doi":"10.1364/OIC.2019.TA.9","DOIUrl":null,"url":null,"abstract":"Analysis of the in situ reflectance spectra during sputtering of gold allows for the characterization of different growth regimes throughout the deposition. The validity of this method is assessed and discussed.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Optimizing the Deposition of Sputtered Gold Island Films with Time Derivative Surface Reflectance\",\"authors\":\"A. Riera, B. Baloukas, O. Zabeida, L. Martinu\",\"doi\":\"10.1364/OIC.2019.TA.9\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Analysis of the in situ reflectance spectra during sputtering of gold allows for the characterization of different growth regimes throughout the deposition. The validity of this method is assessed and discussed.\",\"PeriodicalId\":119323,\"journal\":{\"name\":\"Optical Interference Coatings Conference (OIC) 2019\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Interference Coatings Conference (OIC) 2019\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/OIC.2019.TA.9\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.TA.9","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optimizing the Deposition of Sputtered Gold Island Films with Time Derivative Surface Reflectance
Analysis of the in situ reflectance spectra during sputtering of gold allows for the characterization of different growth regimes throughout the deposition. The validity of this method is assessed and discussed.
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